The standard version of the MEBW-60 L8 is equipped with a compact working chamber and turning chuck mounted on a CNC driven z-axis. The outer work piece dimensions can range from approx. ø 3 mm up to ø 135 mm.

The extended version MEBW-60 L95 is equipped with a CNC driven x/y table. It has a larger chamber which allows for workpiece dimensions of up to 300 x 250 x 200 mm and a x/y travel range of
± 75 mm.

The most recent version of the MEBW-60 family, the L135, is a unique tool combining precise electron beam power control down to the µm-range with high productivity and ultimate flexibility.


SEM Mode “Scan & View”

To weld in the micro range an exact positioning of the beam is required. With the FOCUS MEBW-60 the work piece can be observed in its totality and in the microscopic range up to a resolution of about 25µm by means of a scanning electron beam (SEM-mode). To generate the picture two alternative detectors can be selected. During the welding of dissimilar metals an enhanced material contrast is needed (0° detector) and to enhance the topographic contrast the 45° detector can be used.

Software Package

The included software package allows to program complex welding tasks with a CNC control unit, or for delicate parts like shown in the picture, with a “teach-in-programming” which allows the drawing of the designated welding trace into the SEM-Picture. To simplify the programming of the common weld tasks like circular welds we provide a very user friendly programming software, including spot welding to avoid distortion through the welding.

CNC System

For high-precision processing an exact workpiece manipulation is necessary. In order to achieve this, we have developed a CNC system with position accuracy less than 30 µm and a movement speed of up to 100 mm/s. For reduced maintenance, the stepper motors are located outside the chamber.

Whenever the workpiece requires axial or radial welding we offer different rotary manipulators which are fully integrated into the CNC control unit.


A customized work piece fixture is very important. We offer standard devices like three-bracket chucks in different sizes or customized solutions that fits your needs including for example a 6-chuck revolver mount.

The measurement of the temperature is possible with thermocouple bushing.


SpecificationMEBW-60 L8MEBW-60 L95
Accelerating voltage5 to 60 kV continuously
5 to 60 kV continuously
0.015 mA – 33 mA @ 60 kV,
min step width 15µA,
DC and fast pulse mode,
min pulse width 10µsec
0.015 mA – 33 mA @ 60 kV,
min step width 15µA,
DC and fast pulse mode,
min pulse width 10µsec
2 kW2 kW
Beam diameter @ 1mA< 50 μm< 50 μm
Maximum beam
deflection angle
Working chamber
Ø235 mm x 200 mm500 x 500 x 400 mm ³
Work piece
Ø100 mm x 150 mm250 x 230 x 170 mm³
Travel speed0.1 to 100 mm/s0.1 to 100 mm/s
Rotary speedfrom 0.1 to 1000 rpm
continuously adjustable
from 0.1 to 100 rpm
continuously adjustable
Position accuracy< 30 µm< 30 µm
SEM image
down to approx. 25 μmdown to approx. 25 μm
Pump down timeapprox. 2 minutesapprox. 3 minutes
Foot print2 m x 2 m (angled setup) or
1 m x 3 m (straight setup)
2 m x 2 m (angled setup) or
1 m x 3 m (straight setup)
Power Supply230 V / 3.6 kW, single phase400 V / 4.6 kW, triple phase
Gross Weightapprox. 350 kgapprox. 750 kg