The standard version of the MEBW-60 L8 is equipped with a compact working chamber and turning chuck mounted on a CNC driven z-axis. The outer work piece dimensions can range from approx. ø 3 mm up to ø 135 mm.
The extended version MEBW-60 L95 is equipped with a CNC driven x/y table. It has a larger chamber which allows for workpiece dimensions of up to 300 x 250 x 200 mm and a x/y travel range of
± 75 mm.
The most recent version of the MEBW-60 family, the L135, is a unique tool combining precise electron beam power control down to the µm-range with high productivity and ultimate flexibility.
Features
SEM Mode “Scan & View”
To weld in the micro range an exact positioning of the beam is required. With the FOCUS MEBW-60 the work piece can be observed in its totality and in the microscopic range up to a resolution of about 25µm by means of a scanning electron beam (SEM-mode). To generate the picture two alternative detectors can be selected. During the welding of dissimilar metals an enhanced material contrast is needed (0° detector) and to enhance the topographic contrast the 45° detector can be used.
Software Package
The included software package allows to program complex welding tasks with a CNC control unit, or for delicate parts like shown in the picture, with a “teach-in-programming” which allows the drawing of the designated welding trace into the SEM-Picture. To simplify the programming of the common weld tasks like circular welds we provide a very user friendly programming software, including spot welding to avoid distortion through the welding.
CNC System
For high-precision processing an exact workpiece manipulation is necessary. In order to achieve this, we have developed a CNC system with position accuracy less than 30 µm and a movement speed of up to 100 mm/s. For reduced maintenance, the stepper motors are located outside the chamber.
Whenever the workpiece requires axial or radial welding we offer different rotary manipulators which are fully integrated into the CNC control unit.
Extras
A customized work piece fixture is very important. We offer standard devices like three-bracket chucks in different sizes or customized solutions that fits your needs including for example a 6-chuck revolver mount.
The measurement of the temperature is possible with thermocouple bushing.
Specifications
| MEBW-60 L8 | MEBW-60 L95 | MEBW-60 L135 | |
| Accelerating voltage | between 5 to 60 kV continuously adjustable | between 5 to 60 kV continuously adjustable | between 5 to 60 kV continuously adjustable |
| Maximum Beam current | 0.015 mA – 33 mA @ 60 kV, min step width 15µA, DC and fast pulse mode, min pulse width 10µsec | 0.015 mA – 33 mA @ 60 kV, min step width 15µA, DC and fast pulse mode, min pulse width 10µsec | 0.015 mA – 33 mA @ 60 kV, min step width 15µA, DC and fast pulse mode, min pulse width 10µsec |
| Beam power | 2 kW | 2 kW | 2 kW |
| Beam diameter @ 1mA | < 50 μm | < 50 μm | < 50 μm |
| Maximum beam deflection angle | ±8° | ±8° | ±8° (depending on deflection system) |
| Working chamber dimension | Ø235 mm x 200 mm | 500 x 500 x 400 mm ³ | 500 x 500 x 540 mm ³ |
| Work piece dimension | Ø100 mm x 150 mm | 250 x 230 x 170 mm³ | 250 x 230 x 170 mm³ |
| Workpiece handling | Linear/rotary manipulator | x/y CNC table with internal rotary device (tilting as option) | x/y CNC table with internal rotary device (tilting as option) CNC single or six-drum rotary motion manipulator CNC linear egun slide |
| Travel speed | 0.1 to 100 mm/s | 0.1 to 100 mm/s | 0.1 to 100 mm/s (x/y CNC table) 0.1 to 10 mm/s (CNC linear egun slide) |
| Rotary speed | from 0.1 to 1000 rpm continuously adjustable | from 0.1 to 100 rpm continuously adjustable | from 0.1 to 30 rpm continuously adjustable (CNC single or six-drum rotary motion manipulator) |
| Position accuracy | < 30 µm | < 30 µm | < 30 µm |
| SEM image resolution | down to approx. 25 μm | down to approx. 25 μm | down to approx. 25 μm |
| Pump down time | approx. 2 minutes | approx. 3 minutes | approx. 3 minutes |
| Foot print | 2 m x 2 m (angled setup) or 1 m x 3 m (straight setup) | 2 m x 2 m (angled setup) or 1 m x 3 m (straight setup) | 2.3 m x 3.9 m (angled setup incl. rack) or 1 m x 3 m (straight setup) |
| Power Supply | 230 V / 3.6 kW, single phase | 400 V / 4.6 kW, triple phase | 400 V / 4.6 up to 10 kW, triple phase (depending on configuration) |
| Gross Weight | approx. 350 kg | approx. 750 kg | approx. 1500 kg |