Micro Electron Beam Processing Machines

MEBW-60 L8

MEBW-60 L95

Focus MEBW-60 L8 Electron Beam Micro Welder

The standard version of the MEBW-60 is equipped with a compact working chamber and turning chuck mounted on a CNC driven z-axis. The outer work piece dimensions can range in this case between ca. ø 3 mm up to ø 135 mm.

Focus MEBW-60 L95 Electron Beam Micro Welder

The extended version MEBW-60 L95 is equipped with a CNC driven x/y table. It has a larger chamber to allow which allows workpiece dimension of up to 300 x 250 x 200 mm and a x/y travel range of 150 mm.

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SEM Mode "Scan & View"

To weld in the micro range an exact positioning of the beam is required. With the FOCUS MEBW-60 the work piece can be observed at any time in its totality and in the microscopic range up to a resolution of about 25µm by means of a scanning electron beam (SEM-mode). To generate the picture two alternative detectors can be selected. During the welding of dissimilar metals an enhanced material contrast is needed (0° detector) and to enhance the topographic contrast the 45° detector can be used.

Software Package

The included software package allows to program complex welding tasks with a CNC control unit, or for delicate parts like in the figure, with a “tech-in-programming” which allows the drawing of the designated welding trace into the SEM-Picture. To simplify the programming of the common weld tasks even more, like circular welds, we install a very user friendly programming software including spots welding to avoid distortion through the welding.

CNC System

For high-precision processing an exact workpiece manipulation is necessary. To comply to this, we developed a CNC system with position accuracy less than 30 µm and a movement speed of 100 mm/s. Another big advantage is that the stepper motor for each axis is outside of the chamber.
If your workpieces requires axial or radial welding you can use the included internal rotary manipulator which is fully integrated into the CNC control unit.


A customized clamping of your parts is very important. We offer standard devices like three-bracket chucks in different sizes or as always customized solutions that fits to your task.
The measurement of the temperature is possible with thermocouple bushing.


Spezification MEBW-L8 MEBW-L95
Accelerating voltage between 5 to 60 kV continuously adjustable between 5 to 60 kV continuously adjustable
Maximum beam current 33 mA @ 60kV / 40 mA @ 50 kV 33 mA @ 60kV / 40 mA @ 50 kV
Maximum beam power 2 kW 2 kW
Beam diameter less than 50 μm less than 50 μm
Maximum beam deflection angle ±15° ±15°
Working chamber dimension Ø235 mm x 155 mm 500 mm x 400 mm x 475 mm
Work piece dimension Ø150 mm x 100 mm 250 mm x 200 mm x 100 mm
Linear speed 0.1 to 100 mm/s 0.1 to 100 mm/s
Rotary speed from 0.1 to 1000 rpm continuously adjustable from 0.1 to 100 rpm continuously adjustable
Position accuracy less than 30 µm less than 30 µm
SEM image resolution down to ca. 25 μm down to ca. 25 μm
Pump down time ca. 2 minutes ca. 3 minutes
Foot print 2 m x 2 m (angle-assembly) or 1 m x 3 m (straight) 2 m x 2 m (angle-assembly) or 1 m x 3 m (straight)
Power Supply 230 V / 3.6 kW, single phase 400V / 4.6 kW, triple phase
Gross Weight ca. 350 kg ca. 750 kg