The standard version of the MEBW-60 is equipped with a compact working chamber and turning chuck mounted on a CNC driven z-axis. The outer work piece dimensions can range in this case between ca. ø 3 mm up to ø 135 mm.
The extended version MEBW-60 L95 is equipped with a CNC driven x/y table. It has a larger chamber to allow which allows workpiece dimension of up to 300 x 250 x 200 mm and a x/y travel range of 150 mm.
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SEM Mode "Scan & View"
If your workpieces requires axial or radial welding you can use the included internal rotary manipulator which is fully integrated into the CNC control unit.
|Accelerating voltage||between 5 to 60 kV continuously adjustable||between 5 to 60 kV continuously adjustable|
|Maximum beam current||33 mA @ 60kV / 40 mA @ 50 kV||33 mA @ 60kV / 40 mA @ 50 kV|
|Maximum beam power||2 kW||2 kW|
|Beam diameter||less than 50 μm||less than 50 μm|
|Maximum beam deflection angle||±15°||±15°|
|Working chamber dimension||Ø235 mm x 155 mm||500 mm x 400 mm x 475 mm|
|Work piece dimension||Ø150 mm x 100 mm||250 mm x 200 mm x 100 mm|
|Linear speed||0.1 to 100 mm/s||0.1 to 100 mm/s|
|Rotary speed||from 0.1 to 1000 rpm continuously adjustable||from 0.1 to 100 rpm continuously adjustable|
|Position accuracy||less than 30 µm||less than 30 µm|
|SEM image resolution||down to ca. 25 μm||down to ca. 25 μm|
|Pump down time||ca. 2 minutes||ca. 3 minutes|
|Foot print||2 m x 2 m (angle-assembly) or 1 m x 3 m (straight)||2 m x 2 m (angle-assembly) or 1 m x 3 m (straight)||Power Supply||230 V / 3.6 kW, single phase||400V / 4.6 kW, triple phase||Gross Weight||ca. 350 kg||ca. 750 kg|